2014-07-10 by GUTC Admin in ACT 12 Coater High precision DI Flow System 機台:ACT 12 Coater 應用:利用EV Trigger-in signal 確認verify flow 開始動作,並Interlock Exhaust Alarm,有效偵測DI Flow。 系統架構圖: 0 Recommend Share ACT 12 Coater flow sensor MSD Tagged in