2014-07-10 by GUTC Admin in Ebara FREX300 Ebara CMP Machine Slurry Flow Monitor 機台:Ebara FREX300 應用:Ebara CMP機台沒有Slurry Flow 監測機制,但藉由外加 Slurry Flow Sensor並上FDC後,可監視Flow變化預防產品報廢或yield suffer。 系統架構圖: 1 Recommend Share Ebara flow sensor MSD Tagged in