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ESC (electrostatic chuck) 加裝 TC sensor
06 十月 2013
Hot Plate Temperature Monitoring System
09 十二月 2013
2013-11-05 by in METE

MSD電壓偵測

 

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機台：METE

mete

 

 

 

 

 

 

 

應用：Monitor He ISO valve status

msd-12

 

 

 

 

 

 

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系統架構圖：

msd-13

 

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